Lukas, Sebastian; Jangra, Vikas; Rademacher, Nico; Gross, Michael; Desgué, Eva; Prechtl, Maximilian; Hartwig, Oliver; Ó Coileáin, Cormac; Stimpel-Lindner, Tanja; Kataria, Satender; Legagneux, Pierre; Düsberg, Georg; Lemme, Max C.
Dokumenttyp:
Konferenzbeitrag / Conference Paper
Titel:
Freely Suspended Platinum Diselenide Membranes without Polymer Support for Piezoresistive Pressure Sensing
Titel Konferenzpublikation:
2023 Device Research Conference (DRC)
Veranstalter (Körperschaft):
University of California
Konferenztitel:
Device Research Conference (2023, Santa Barbara, Calif.)
Tagungsort:
Santa Barbara, Calif., USA
Jahr der Konferenz:
2023
Datum Beginn der Konferenz:
25.06.2023
Datum Ende der Konferenz:
28.06.2023
Verlagsort:
Piscataway, NJ
Verlag:
IEEE
Jahr:
2023
Seiten von - bis:
1-2
Sprache:
Englisch
Abstract:
Platinum diselenide (PtSe2) is a layered two-dimensional (2D) material with outstanding electronic and piezoresistive
properties [1–3]. It has demonstrated its potential for membrane-based pressure sensor devices, where poly(methyl
methacrylate) (PMMA) supported and suspended the PtSe2 membranes [4]. The impact of the polymer support layer
on the response of the suspended 2D material is still under investigation [5]. To study the strain and the piezoresistive
behavior, we fabricated and analyzed devices based on suspended PtSe2 membranes with and without polymer support.