Platinum films, used in thin film technology, produced by radiofrequency sputter deposition on alumina substrates under different conditions, have been studied by positron beam and other techniques, before and after production annealing. The defect structure in the layers has been characterized using both positron lifetime and Doppler broadening spectroscopy, and compared with X-ray studies of crystallinity and texture. The films are topographically irregular, with a grain size comparable to the thickness of the layer. All layers show pronounced crystallographic texture but this does not appear to be related to the sample processing.    «

Platinum films, used in thin film technology, produced by radiofrequency sputter deposition on alumina substrates under different conditions, have been studied by positron beam and other techniques, before and after production annealing. The defect structure in the layers has been characterized using both positron lifetime and Doppler broadening spectroscopy, and compared with X-ray studies of crystallinity and texture. The films are topographically irregular, with a grain size comparable to the...    »