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Autoren:
Polisski, G.; Kovalev, D.; Dollinger, Günther; Sulima, T.; Koch, Frederick 
Dokumenttyp:
Zeitschriftenartikel / Journal Article 
Titel:
Boron in mesoporous Si - where have all the carriers gone? 
Zeitschrift:
Physica. B, Condensed matter 
Heftnummer:
273-274 
Jahr:
1999 
Seiten von - bis:
951-954 
Sprache:
Englisch 
Stichwörter:
Crystal microstructure ; Electrochemistry ; Electrolytes ; Etching ; Nanostructured materials ; Porous silicon ; Secondary ion mass spectrometry ; Semiconducting boron ; Semiconductor doping, Elastic-recoil detection analysis ; Electrolytic erosions, Semiconducting silicon 
Abstract:
Highly-doped p-type Si is electrochemically etched in an HF-based electrolyte to produce mesoporous surface layers. Using both elastic-recoil detection analysis and secondary ion mass spectroscopy it is concluded that B atoms are not removed from the porous layer. Crystallite size for the most porous samples is related to the average dopant spacing. It is argued that the electrolytic erosion of Si stops when B is in the surface layer and passivated. 
ISSN:
0921-4526 
Fakultät:
Fakultät für Luft- und Raumfahrttechnik 
Institut:
LRT 2 - Institut für angewandte Physik und Messtechnik 
Professur:
Dollinger, Günther 
Open Access ja oder nein?:
Nein / No