Projektbeschreibung:
Combining bistable working piezo driven micropumps to a multistage assembly enable new functions and pressure areas. In this project, the basic interaction of the single actuators with each other as well as the design rules, both for the bistable actuators and the interaction, are investigated. The project is based on more than 25 years of research and developments of microfluidic actuators, and on an established design methodology of silicon micropumps.