@manual{ titlea = "Dr.-Ing.", vornamea = "Stephan", namea = "Zimmermann", departmenta = "Fakultät für Elektrotechnik und Informationstechnik", institutea = "EIT 1 - Institut für Plasmatechnik und Mathematik", titleb = "", vornameb = "", nameb = "", departmentb = "", instituteb = "", titlec = "", vornamec = "", namec = "", departmentc = "", institutec = "", external-funds = "ALD Vacuum Technologies GmbH", company = "", project-title = "ALD Vacuum Technologies GmbH_Diagnostik", project-abstract = "Plasmadiagnostik-Plasma-Generatoren-Verhalten an ALD Vacuum Technologies GmbH -Spezifischen Anlage", proj-beginn = "01.04.2015", proj-end = "31.12.2015", forschungszentrum = "" }