@article{, author = {Bergmaier, Andreas; Dollinger, Günther; Frey, C. M.}, title = {A compact ΔE-Eres detector for elastic recoil detection with high sensitivity}, editor = {}, booktitle = {}, series = {}, journal = {Nuclear Instruments and Methods in Physics Research Section B}, address = {}, publisher = {}, edition = {}, year = {1998}, isbn = {}, volume = {}, number = {136-138}, pages = {638-643}, url = {http://www.sciencedirect.com/science/article/pii/S0168583X9700877X}, doi = {10.1016/S0168-583X(97)00877-X}, keywords = {Ion beams ; Ionization chambers ; Semiconductor diodes ; Silicon sensors ; Spectrographs ; Telescopes, Detector telescopes ; Elastic recoil detection analysis (ERDA) ; Magnetic spectrographs ; Position sensitive detectors, Particle detectors}, abstract = {A new compact ΔE-Eres detector telescope has been installed in the scattering chamber of the Munich Q3D magnetic spectrograph in order to increase the sensitivity and depth resolution in classical elastic recoil detection (ERD) measurements. It consists of a two dimensional position sensitive ionisation chamber for energy loss and a position sensitive silicon PIN diode for residual energy measurements. A large solid angle of detection of about 4.5 msr combined with good angular resolution in x and y directions enables high sensitivity ERD depth profiling with a sensitivity in the ppm range and a depth resolution of about 10 nm.}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Luft- und Raumfahrttechnik, LRT 2 - Institut für angewandte Physik und Messtechnik, Professur: Dollinger, Günther}, }