@article{, author = {Reichart, Patrick; Dollinger, Günther; Bergmaier, Andreas; Datzmann, Gerd; Hauptner, Andreas; Körner, Hans-Joachim; Krücken, Reiner}, title = {3D hydrogen microscopy with sub-ppm detection limit}, editor = {}, booktitle = {Proceedings of the Sixteenth International Conference on Ion Beam Analysis}, series = {}, journal = {Nuclear Instruments and Methods in Physics Research Section B}, address = {}, publisher = {}, edition = {}, year = {2004}, isbn = {}, volume = {}, number = {219-220 (1-4)}, pages = {980-987}, url = {http://www.sciencedirect.com/science/article/pii/S0168583X04002502}, doi = {10.1016/j.nimb.2004.01.200}, keywords = {Hydrogen analysis ; 3D hydrogen imaging ; Proton-proton scattering ; Proton microprobe ; Irradiation damage ; CVD diamond}, abstract = {Coincident elastic proton-proton scattering at a 17 MeV microprobe is used to investigate hydrogen distributions on microscopic scale inside freestanding samples up to some 100 μm thickness. Hydrogen imaging at atomic ppm level needs a total count rate of about 100 kHz of scattered protons in order to get sufficient statistics from the small fraction of coincident hydrogen signals. It is obtained using a highly segmented silicon strip detector of 2.3 sr for proton currents of less than 100 pA impinging on films thicker 10 μm. A five level filter almost completely suppresses accidental coincidences. The sensitivity of this kind of 3D hydrogen microscopy is demonstrated by the analysis of a 55 μm thick synthetic diamond layer showing a detection limit of 0.08 at-ppm hydrogen. In addition, the proposed depth resolution of 3-6 μm is experimentally confirmed and a lateral resolution of 0.6 μm full width half maximum is obtained at a significant hydrogen enhancement inside the layer.}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Luft- und Raumfahrttechnik, LRT 2 - Institut für angewandte Physik und Messtechnik, Professur: Dollinger, Günther}, }