@inproceedings{, author = {Oechsner, Simon; Rose, Oliver}, title = {A filtered beam search approach to scheduling cluster tools in semiconductor manufacturing}, editor = {}, booktitle = {IIE Annual Conference and Exposition : May 14-18, 2005, Atlanta Georgia}, series = {}, journal = {}, address = {Norcross, Ga.}, publisher = {Institute of Industrial Engineers ( IIE )}, edition = {}, year = {2005}, isbn = {}, volume = {}, number = {}, pages = {1}, url = {}, doi = {}, keywords = {}, abstract = {}, note = {}, }