@inproceedings{, author = {Uhlig, Tobias; Rose, Oliver; Fowler, John W.; Kendall, G.; McCollum, B.}, title = {A Multi Species Evolutionary Algorithm for Tool Group Scheduling in Semiconductor Manufacturing}, editor = {}, booktitle = {Proceedings of the 5th Multidisciplinary International Conference on Scheduling : Theory and Applications}, series = {}, journal = {}, address = {}, publisher = {}, edition = {}, year = {2011}, isbn = {}, volume = {}, number = {}, pages = {459-468}, url = {}, doi = {}, keywords = {}, abstract = {}, note = {}, }