@inproceedings{, author = {Dubec, Viktor; Bychikhin, Sergey; Pogany, Dionýz; Gornik, Erich; Groos, Gerhard; Stecher, Matthias}, title = {Error analysis in phase extraction in a 2D holographic imaging of semiconductor devices}, editor = {Jeong, Tung H.; Bjelkhagen, Hans I.}, booktitle = {Practical Holography XVIII : Materials and Applications}, series = {Proceedings SPIE}, journal = {}, address = {}, publisher = {}, edition = {}, year = {2004}, isbn = {}, volume = {5290}, number = {}, pages = {233-242}, url = {https://doi.org/10.1117/12.526551}, doi = {10.1117/12.526551}, keywords = {}, abstract = {}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Technische Informatik, ETTI 1 - Institut für Physik, Elektrotechnik und Automatisierungstechnik, Professur: Groos, Gerhard}, }