@inproceedings{, author = {Sauter, Martin; Bertagnolli, Emmerich; Knapek, E.; Fröschle, B.; Eisele, Ignaz; Klose, H.}, title = {A lateral bipolar transistor on SOI fabricated by sub 100 nm e-beam lithography}, editor = {}, booktitle = {ESSDERC '95 : proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, the Hague, the Netherlands, 25th-27th September 1995}, series = {}, journal = {}, address = {Gif sur Yvette Cedex, France}, publisher = {Editions Frontières}, edition = {}, year = {1995}, isbn = {9782863321829}, volume = {}, number = {}, pages = {}, url = {}, doi = {}, keywords = {}, abstract = {}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Technische Informatik, ETTI 1 - Institut für Physik, Elektrotechnik und Automatisierungstechnik, Professur: Sauter, Martin}, }