@article{, author = {Strasser, Marc; Aigner, Robert; Lauterbach, Christl; Sturm, Thomas F.; Franosch, Martin; Wachutka, Gerhard}, title = {Micromachined CMOS Thermoelectric Generators as On-Chip Power Supply}, editor = {}, booktitle = {}, series = {}, journal = {Sensors and Actuators A: Physical}, address = {}, publisher = {}, edition = {}, year = {2004}, isbn = {}, volume = {114}, number = {2-3}, pages = {362–370}, url = {https://doi.org/10.1016/j.sna.2003.11.039}, doi = {10.1016/j.sna.2003.11.039}, keywords = {}, abstract = {}, note = {}, }