@article{, author = {Chen, Xin; Kohring, Malte; Assebban, M'hamed; Tywoniuk, Bartlomiej; Bartlam, Cian; Badlyan, Narine Moses; Maultzsch, Janina; Düsberg, Georg; Weber, Heiko B.; Knirsch, Kathrin C.; Hirsch, Andreas}, title = {Covalent Patterning of 2D MoS2}, editor = {}, booktitle = {}, series = {}, journal = {Chemistry - a European journal}, address = {}, publisher = {}, edition = {}, year = {2021}, isbn = {}, volume = {27}, number = {52}, pages = {13117-13122}, url = {https://doi.org/10.1002/chem.202102021}, doi = {10.1002/chem.202102021}, keywords = {}, abstract = {The development of an efficient method to patterning 2D MoS2 into a desired topographic structure is of particular importance to bridge the way towards the ultimate device. Herein, we demonstrate a patterning strategy by combining the electron beam lithography with the surface covalent functionalization. This strategy allows us to generate delicate MoS2 ribbon patterns with a minimum feature size of 2 μm in a high throughput rate. The patterned monolayer MoS2 domain consists of a spatially well-defined heterophase homojunction and alternately distributed surface characteristics, which holds great interest for further exploration of MoS2 based devices.}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Informationstechnik, EIT 2 - Institut für Physik, Professur: Düsberg, Georg}, }