@article{, author = {Biba, Josef; Boche, Silke; Goßner, Ursula; Hansch, Walter}, title = {Fabrication and Characterization of 2-Bit per Capacitor as Functional Structures for Physical Unclonable Function Circuits}, editor = {}, booktitle = {}, series = {}, journal = {IEEE Journal of the Electron Devices Society}, address = {}, publisher = {}, edition = {}, year = {2022}, isbn = {}, volume = {10}, number = {}, pages = {157-168}, url = {}, doi = {10.1109/JEDS.2022.3149321}, keywords = {}, abstract = {}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Informationstechnik, EIT 2 - Institut für Physik, Professur: Hansch, Walter}, }