@article{, author = {Huang, Po-Han; Laakso, Miku; Edinger, Pierre; Hartwig, Oliver; Duesberg, Georg S.; Lai, Lee-Lun; Mayer, Joachim; Nyman, Johan; Errando-Herranz, Carlos; Stemme, Göran; Gylfason, Kristinn; Niklaus, Frank}, title = {Three-dimensional printing of silica glass with sub-micrometer resolution}, editor = {}, booktitle = {}, series = {}, journal = {Nature Communications}, address = {}, publisher = {}, edition = {}, year = {2023}, isbn = {}, volume = {14}, number = {}, pages = {3305}, url = {https://doi.org/10.1038/s41467-023-38996-3}, doi = {10.1038/s41467-023-38996-3}, keywords = {}, abstract = {Silica glass is a high-performance material used in many applications such as lenses, glassware, and fibers. However, modern additive manufacturing of micro-scale silica glass structures requires sintering of 3D-printed silica-nanoparticle-loaded composites at ~1200 °C, which causes substantial structural shrinkage and limits the choice of substrate materials. Here, 3D printing of solid silica glass with sub-micrometer resolution is demonstrated without the need of a sintering step. This is achieved by locally crosslinking hydrogen silsesquioxane to silica glass using nonlinear absorption of sub-picosecond laser pulses. The as-printed glass is optically transparent but shows a high ratio of 4-membered silicon-oxygen rings and photoluminescence. Optional annealing at 900 °C makes the glass indistinguishable from fused silica. The utility of the approach is demonstrated by 3D printing an optical microtoroid resonator, a luminescence source, and a suspended plate on an optical-fiber tip. This approach enables promising applications in fields such as photonics, medicine, and quantum-optics.}, note = {}, institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Informationstechnik, EIT 2 - Institut für Physik, Professur: Düsberg, Georg S.}, }