@article{,
    author = {Kühnel, Fabian; Metzke, Christoph; Weber, Jonas; Schätz, Josef; Duesberg, Georg; Benstetter, Günther},
    title = {Investigation of Heater Structures for Thermal Conductivity Measurements of SiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Thin Films Using the 3-Omega Method},
    editor = {},
    booktitle = {},
    series = {},
    journal = {Nanomaterials},
    address = {},
    publisher = {},
    edition = {},
    year = {2022},
    isbn = {},
    volume = {12},
    number =  {11},
    pages = {1928},
    url = {https://doi.org/10.3390/nano12111928},
    doi = {10.3390/nano12111928},
    keywords = {3-Omega method ; 3ω<sub><sub></sub></sub> ; heater geometry ; heater dimensions ; thermal conductivity ; silicon dioxide (SiO<sub>2</sub>) ; aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) ; annealing process},
    abstract = {A well-known method for measuring thermal conductivity is the 3-Omega (3ω) method. A
prerequisite for it is the deposition of a metal heater on top of the sample surface. The known design
rules for the heater geometry, however, are not yet sufficient. In this work, heaters with different
lengths and widths within the known restrictions were investigated. The measurements were carried
out on SiO<sub>2</sub> thin films with different film thicknesses as a reference. There was a significant difference
between theoretical deposited heater width and real heater width, which could lead to errors of up
to 50% for the determined thermal conductivity. Heaters with lengths between 11 and 13 mm and
widths of 6.5 μm or more proved to deliver the most trustworthy results. To verify the performance
of these newfound heaters, additional investigations on Al<sub>2</sub>O<sub>3</sub> thin films were carried out, proving
our conclusions to be correct and delivering thermal conductivity values of 0.81 Wm<sup>-1</sup> K<sup>-1</sup> and
0.93 Wm<sup>-1</sup> K<sup>-1</sup> for unannealed and annealed samples, respectively. Furthermore, the effect of
annealing on Al<sub>2</sub>O<sub>3</sub> was studied, revealing a significant shrinking in film thickness of approximately
11% and an increase in thermal conductivity of 15%. The presented results on well-defined geometries
will help to produce optimized heater structures for the 3ω method.},
    note = {},
    institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Informationstechnik, EIT 2 - Institut für Physik, Professur: Düsberg, Georg},
    
    
}