@unpublished{, author = {Düsberg, Georg}, title = {2D material based sensors}, editor = {}, booktitle = {}, series = {}, journal = {}, address = {}, publisher = {}, edition = {}, year = {2023}, isbn = {}, volume = {}, number = {}, pages = {}, url = {}, doi = {}, keywords = {2D materials ; transition metal dichalcogenides ; sensors ; graphene functionalisation ; hybrid devices}, abstract = {Two-dimensional materials such as graphene or transition metal dichalcogenides (TMDs) are intensively investigated for future applications in electronics and sensing. Graphene is highly attractive for chemiresistive gas- and bio-sensors due to its all-surface nature and compatibility with physiological environment. However, strategies for the successful functionalization to yield selectivity are still in infancy, in particular because of detrimental polymeric residues on 2D material surfaces. This will be discusses in the light of TOF-SIMS investigations on polymeric residues. Progress in non-covalent functionalisation of graphene for reliable sensing of small biomarkers will be presented. As for TMDs, thickness dependent electronic and optical properties such metal-to-semiconductor transitions and high mobilities have moved the group 10 (Pt/Pd) TMDs or Nobel Metal Dichalcogenides (NMDs) to the center of attention. These layered materials have shown high potential for NEMS, optoelectronic devices and chemical sensors. [1] Catalyst free scalable synthesis of polycrystalline of a number of TMDs, in particular PtSe2, is presented in this talk. [2] The direct growth on allows the processing of the layers without mechanical transfer and even deposition on structured substrates [3]. The low temperature synthesis allows the back end of line (BEOL) integration compatible with silicon technology. In this regard, examples for high performance chemical sensors, [1] IR-photodetectors[4] and MEMS[5] devices with PtSe2 will be presented. The composition and morphology of the grown films are investigated by several characterization techniques including Raman spectroscopy, SPM and X-ray photoelectron spectroscopy. Challenges in the understanding of the structure-property relationship of polycrystalline PtSe2 films are discussed.}, note = {Vortrag bei IEEE NAP-2023}, institution = {Universität der Bundeswehr München, Fakultät für Elektrotechnik und Informationstechnik, EIT 2 - Institut für Physik, Professur: Düsberg, Georg}, }