@manual{
	titlea = "Prof.",
	vornamea = "Walter",
	namea = "Hansch",
	departmenta = "Fakultät für Elektrotechnik und Informationstechnik",
	institutea = "EIT 2 - Institut für Physik",
	titleb = "",
	vornameb = "",
	nameb = "",
	departmentb = "",
	instituteb = "",
	titlec = "",
	vornamec = "",
	namec = "",
	departmentc = "",
	institutec = "",
	external-funds = "PVA Tepla AG",
	company = "",
	project-title = "Hochflexible Chips",
	project-abstract = "Entwicklung von Plasmaätzprozessen zur schonenden Dünnung und Trennung von Halbleiter-Chips.",
	proj-beginn = "05.11.2010",
	proj-end = "04.11.2015",
	forschungszentrum = ""
}