@manual{ titlea = "Dr.-Ing.", vornamea = "Stephan", namea = "Zimmermann", departmenta = "Fakultät für Elektrotechnik und Informationstechnik", institutea = "EIT 1 - Institut für Plasmatechnik und Mathematik", titleb = "", vornameb = "", nameb = "", departmentb = "", instituteb = "", titlec = "", vornamec = "", namec = "", departmentc = "", institutec = "", external-funds = "ALD Vacuum Technologies GmbH", company = "", project-title = "ALD Vacuum Technologies GmbH - Diagnostik", project-abstract = "Forschungsarbeiten auf dem Gebiet der Diagnostik bei ALD Vacuum Technologies GmbH – Anlagen", proj-beginn = "28.10.2013", proj-end = "27.10.2014", forschungszentrum = "" }