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Document type:
Konferenzbeitrag / Conference Paper
Title:
Error analysis in phase extraction in a 2D holographic imaging of semiconductor devices
Collection editors:
Jeong, Tung H.; Bjelkhagen, Hans I.
Title of conference publication:
Practical Holography XVIII
Subtitle of conference publication:
Materials and Applications
Series title:
Proceedings SPIE
Series volume:
5290
Conference title:
Electronic Imaging (2004, San Jose, CA); IS&T/SPIE Annual Symposium on Electronic Imaging (16., 2004, San Jose, CA)
Venue:
San Jose, CA, USA
Year of conference:
2004
Date of conference beginning:
18.01.2004
Date of conference ending:
22.01.2004
Year:
2004
Pages from - to:
233-242
Language:
Englisch
DOI:
Department:
Fakultät für Elektrotechnik und Technische Informatik
Institute:
ETTI 1 - Institut für Physik, Elektrotechnik und Automatisierungstechnik
Chair:
Groos, Gerhard
Open Access yes or no?:
Nein / No
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